Televac® 3F Mini BA Hot Ion Ultra-High Vacuum Gauge (UHV)

3F Hot Ion Vacuum Gauge
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Part Numbers: 3451-8305-25, 3451-8305-35, 3452-8306-05

Compatible With: MC300 (Legacy), MM200 (Legacy)

The Televac® 3F Mini BA Hot Cathode Ionization UHV gauge maximizes performance with proven accuracy and unmatched durability in high vacuums. The miniature sensor’s rugged all-metal construction is ideal for most applications, with the primary enclosure and many of the internal elements fabricated of 304 stainless steel. The dual filaments are yttria-coated iridium and are individually supported to provide uniform output over variations in temperature and age and exhibit less calibration error. Coated iridium filaments tend to withstand pressure bursts with a robustness not possible with lesser materials. The typical user should experience a filament lifetime of 10,000 hours. The precision ion collector is 0.004” diameter, decreasing the x-ray limit of the gauge.

Specifications

Measurement Range 1*10‐2 to 1*10‐10 Torr
Sensitivity for Nitrogen 10/Torr
Bakeout Temperature 200 °C
Operating Temp 0 °C to 50 °C
X‐Ray Limit <1*10-10 Torr
Filament Emission Current .01, 0.1, 1.0 mA or Auto
Filament Bias Potential +30 V +/‐ 0.3%
Grid Potential +180 V +/‐ 0.3%
Filament Heating Voltage 1.5 V Typical (2.5 V Max)
Filament Heating Current 1.5 A Typical (3 A Max)
Mounting Orientation Any
Degas Power 5 W e-beam

Applications

Cryogenics and industrial gases
Semiconductor
Thin film deposition and coating processes
Analytical Instruments
Decorative Coating
Electron Microscopy
Environmental Simulation
High Energy Physics
Illumination Product Mfg.
Magnetic Media Mfg.
Molecular Beam Epitaxy
Optical & Functional Coating
Physical Vapor Deposition
Surface Science
Thermal Processing