说明
This application note shows the MX200 Vacuum Controller analog (0 to 10 V DC) output settings that are equivalent to an MM200 Vacuum Controller.
对比图
绿色突出显示的值是该传感器类型的MX200默认设置。
红色突出显示的值是该传感器类型的MM200默认设置。
| 传感器 | M200 Code | MX200设置 | 高价值 | 低值 |
| 1E | R1EN | Linear (LIN) | 1.0E+03 Torr | 1.0E+00 Torr |
| R1EL | Not supported | - | - | |
| 1F | R1EN | Linear (LIN) | 1.0E+04 Torr | 1.0E+01 Torr |
| R1EL | Not supported | - | - | |
| 2A | R2AN | Linear (LIN) | 1.0E+00 Torr | 1.0E-03 Torr |
| R2AL | Logarithmic (LOG) | 1.0E+00 Torr | 1.0E-03 Torr | |
| R2AT | Not supported | - | - | |
| R2AC | Not supported | - | - | |
| R2AR | Not supported | - | - | |
| 4A | R4AN | Linear-by-decade (L-D) | 1.0E+03 Torr | 1.0E-03 Torr |
| R4AU | Linear (LIN) | 1.0E+00 Torr | 1.0E-03 Torr | |
| R4AT | Not supported | - | - | |
| R4AL | Logarithmic (LOG) | 1.0E+03 Torr | 1.0E-03 Torr | |
| 5A/5B/5C/5D/5E/5F | R5AN | Linear (LIN) | Full scale | Full scale * 0.001 |
| R5AL | Not supported | - | - | |
| 7B | R7BM | Linear-by-decade (L-D) | 1.0E-03 | 1.0E-07 |
| R7BL | Logarithmic (LOG) | 1.0E-03 | 1.0E-07 | |
| R7BE | Not supported | - | - | |
| R7BN | Linear (LIN) | 1.0E-03 | 1.0E-06 | |
| R7BA | Not supported | - | - | |
| R7BT | Not supported | - | - | |
| 7E | R7EM | Linear-by-decade 7E (L-D 7E) | 1.0E-02 | 1.0E-08 |
| R7EL | Logarithmic (LOG) | 1.0E-02 | 1.0E-11 | |
| R7Ex | Linear (LIN) | 1.0E-0x* | 1.0E-(x+3)* | |
| 7F/7FC/7FCS | R7FM | Linear-by-decade (L-D) | 1.0E-02 | 1.0E-11 |
| R7FL | Logarithmic (LOG) | 1.0E-02 | 1.0E-11 | |
| R7Fx | Linear (LIN) | 1.0E-0x* | 1.0E-(x+3)* |
*取决于x值；7E=2≤x≤5，7F/7FC/7FCS=2≤x≤8。
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• 1*10-11 Torr to 1*104 Torr
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